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MFC 100 sccm N2
Model: 5850S
| Category | Mass flow Controller |
| Manufacturer | Brooks |
| Model | 5850S |
| Flow Range | 0 – 100 sccm 0–500 sccm |
| Analog Signal | 0-5 V |
| Digital Signal | None |
| Seals | VITON |
| Fittings | VCR |
| Connector | 9 pins |
| Inlet Pressure | More to 0 psig |
| Calibrated Gas | N2 |